Chinese
home / news / Industry Applications

Highly fast and automated measurement solution for mask plate shapes

2023-10-12

    Share to

Atometrics White Light Interferometer ER-230: Rapid Automated Inspection of Mask Plate Pattern Height


The Atometrics White Light Interferometer AM-7000 series offers sub-nanometer accuracy.

Maximum RMS repeatability of 0.002nm, with a large range of piezoelectric ceramic devices, the maximum scanning speed of 400μm / sec.

3200Hz plus the industry's first SST + GAT algorithm, can instantly complete up to 5 million point cloud acquisition.

White light interferometer is based on white light interference principle, through the optical interference phase measurement, any magnification can be obtained under the detection accuracy of less than 1nm.

Covering common international standard measurement tools in the market, it analyzes 3D data with high efficiency and ease, and copes with applications in various industries with ease.


Return to List