Microlens arrays are optical devices in which numerous microlenses are arranged and combined according to a certain pattern. Playing the role of gathering or dispersing light paths, they are characterized by high resolution and high sensitivity.

They are widely used in laser devices that require homogenized lasers, digital projectors that gather light, and consumer electronics for compact imaging.

How to quickly, accurately and conveniently measure their tiny critical dimensions to ensure yield is a pain point that has plagued manufacturers for years.

Fig. 1- Imaging effect of microlens under UCOMET white light interferometer

radius of curvature.

Affects the position of the focal length, the larger the radius of curvature, the longer the focal length. It is an essential measurement in the quality control process.

 Figure 2 - Microlens radius of curvature measurements for AtometricsT white light interferometer

diameter and height.

Problems affecting the uniformity of microlens arrays and hence imaging uniformity, coupling, etc.

 Figure 3 - Microlens Diameter, Height Measurements of Atometrics White Light Interferometer

surface roughness.

There is a significant impact on the optical path, which can seriously lead to the failure of some microlenses in the array, or even destroy the imaging effect of other microlens units.

Figure 4 - Roughness measurement by Atometrics white light interferometer

Face shape.

Atometrics white light interferometer is an important parameter for the overall shape of the surface, which enables the comparison of the surface profile and the calculation of the K-value.

The Atometrics white light interferometer AM series is perfectly suited for measurements in the field of microlensing!

And in the following points to achieve the industry Top effect

1、High NA value lens & low light extraction algorithm, large angle characteristics, edge size at a glance;

2, High speed piezoelectric ceramics & unique SST algorithm, can be up to 400μm/s scanning, rapid imaging;

3, ultra-smooth lens roughness easy to measure, as low as 0.02% reflectivity can also be fine acquisition of imaging;

If you are interested in the related applications, please feel free to call the service number 400 080 3885.

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